EnerStream, DC power supply for sputtering with advanced arc handling

Specifications (DC, 1 channel)

EnerStream 5EnerStream 10EnerStream 20EnerStream 30EnerStream 60
Input3Ø 208V/220V/380V3Ø 208V/220V/380V3Ø 220V/380V3Ø 220V/440V3Ø 380V/440V
Voltage (max)800V800V800V800V900V
Ignition1500V
Current (max)12.5A25A50A75A150A
Power (max)DC 5kWDC 10kWDC 20kWDC 30kWDC 60kW
Arc energy<0.5mJ/kW<0.2mJkW
InterfaceRS-232/RS-485 (options: DeviceNet, PROFIBUS)
Size (h×w×d), mm133×483×605133×483×605133×483×605177×483×655309×483×783
Weight, kg24.524.530.538.880
CoolingForced Air

Specifications (DC, 2 channels)

EnerStream 5DEnerStream 10D
Input3Ø 380V3Ø 380V
Voltage (max)800V /Ch900V /Ch
Ignition1500V/Ch
Current (max)12.5A /Ch25A /Ch
Power (max)DC 5kW+5kWDC 10kW+10kW
Arc energy<0.5mJkW
InterfaceRS-232/RS-485 (options: DeviceNet, PROFIBUS)
Size (h×w×d), mm133×483×655133×483×655
Weight (kg)3232
CoolingForced Air