VACUUM LEAK DETECTION

TECHNOLOGY

SPOES (Self-plasma OES) leak detection system consists of
- a miniature plasma cell and
- an OES system.
SPOES is a UV-VIS-nIR-based OES technology that generates plasma and acquires real-time plasma emission spectra to detect leaks.
SPOES systems can be used in a multitude of leak detection scenarios, including: Argon-spray mode leak checking, Vacuum "ready" state detection, Online mode process leak tightness monitoring, Online mode process quality monitoring, Fault detection/recognition
Spray-mode argon leak testing consists of evacuating the system, spraying argon on areas suspected of leaks, and using a detector to measure the levels of nitrogen and argon inside the system. If a drop in nitrogen levels and a corresponding rise in argon levels are detected and occur simultaneously, this indicates the presence of a leak.
The low cost SPOES-based leak detection solution is compatible with all significant vacuum-based processes: IAD, ALD, CVD, PVD, Plasma etch, HIPping, Lyophilization (Freeze-drying), Deuterium-Tritium (DT) fusion, etc.

Inteleg® Ar-0He™ SPOES leak detection systems are effective across a wide pressure range - from high vacuum (down to 7.5E-7 Torr) to process pressures (up to 0.75 Torr).
We use Inteleg® Ar-0He™ for real-time Argon spray (no Helium) leak detection, on-line process gas composition evaluation, vacuum quality monitoring, and fault detection.
Inteleg® Ar-0He™ can be field deployed inexpensively, quickly, and their robustness and compact design ensure low maintenance and high reliability, even in demanding environments.
The industrial leak test using argon as the test gas provides a significant cost and test time advantage, with cycle times of only a few seconds, and greatly enhances test reliability.

Mass-spectrometer-based Helium leak detection is widely recognised for its high sensitivity, safety, and real-time detection capabilities, making it a standard in various industries.
However, this method has notable drawbacks, including high costs, supply issues, complex equipment, and excessive sensitivity.
Environmental factors can impact helium leak measurement accuracy, prompting the need for alternative solutions.

Inteleg® Ar-0He™ leak detection systems offer a practical low-cost approach to real-time leak detection. It utilises optical emissions from a plasma cell and employs readily available Argon instead of expensive Helium for "spray" mode leak checking.
Argon is inexpensive, non-toxic, and safe to use, rendering the "smart" leak detector features, such as helium background suppression a thing of the past.
The test's quantitative results can be documented quickly and easily, along with all system and process parameters.
Inteleg® Ar-0He™ operates at pressures 7.5E-7 to 0.75 Torr. The wide operating pressure range of SPOES makes detecting small and large leaks equally easy.
Inteleg® Ar-0He™ may be used with or without pumping systems to detect leaks at high pressures.
Inteleg® Ar-0He™ provides real-time leak detection, vacuum quality and condition monitoring, pump-down analysis, and fault detection for vacuum diagnostics.
Inteleg® Ar-0He™ features a rugged and compact design and is low-maintenance.
Inteleg® Ar-0He™ communicates using industrial protocols like Modbus/TCP and PROFINET, providing a straightforward pathway for automated testing procedures and sequences.