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INTELEG® INLINE-R SHEET RESISTANCE MEASUREMENT SYSTEMS
- for serial production and routine laboratory use. This versatile contactless instrument measures properties of conducting layers precisely and in real-time.
- Inteleg® Inline R is a 24/7 product that automatically recognises the measured material and informs instantly of layer quality deviations. It operates comfortably at various measurement ranges, covering a wide range of advanced thin-film materials and critical processes.
- Inteleg® Inline R controller provides multi-channel fast feedback (PID) process control (e.g. power level, gas flow, P.E.M set-point) that keeps layer properties constant, optimises quality, prevents scrap, and maximises yield. The system is designed to last tens of thousands of hours, is highly reliable, and offers a low ownership cost.
DETAILS
- Real-time, 24/7, 99.999% up-time
- Multi-channel PID / PDF control
- Multi-level closed loop control
- In-vacuum and ex-vacuum mounting
- Material recognition, layer quality index
- Digital sensor, digital actuator
- Teachable measuring range
- Modbus/TCP, EtherCAT, PROFINET, REST API
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