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Plasma Emission Monitoring



  • Plasma Emission Monitoring (PEM) is a real-time closed-loop control method used for
    • high-speed precision reactive gas flow control,
    • high-rate sputter deposition of compound films,
    • continuous operation in the metastable "transition" mode,
    • reactive gas flow control while sputtering in the "ceramic" mode,
    • composition control co-sputtering metal-metal composites or mixed compounds,
    • doping control.
  • Broadband PEM (2B-PEM) is a UV-VIS-nIR based PEM technology that acquires real-time plasma emission spectra to control and monitor plasma-based processes.
  • 2B-PEM enables rapid and precise mass-production of thin films, such as metal oxides, nitrides, oxynitrides, carbides, metal-metal composites and oxide mixtures.
  • 2B-PEM enables dramatic throughput improvement compared to RF sputtering. Optimisation of PEM working-point leads to substantially enhanced film properties.


Nova Fabrica 2B-PEM® systems fuse seamlessly with production lines in intelligent factories. They control actuators (e.g. mass flow controllers or plasma process power supplies) by sensing one or multiple plasma emission lines and automatically adjusting the actuator output precisely and at high speed. As a result, fixing the plasma process at an otherwise unstable working point throughout the production run is a breeze. The result is a high-rate deposition and consistent film composition while avoiding target poisoning.


Coating technologies are becoming increasingly complex as performance, and environmental requirements change. You develop new materials and layer stacks to address the current needs. Enhancing your existing and new coaters’ process monitoring and control capabilities is a critical aspect of increasing product value, coater productivity, and reducing the overall ownership cost.


Lift your processes to the next level of performance and productivity. Inteleg® 2B-PEM® solutions provide precise and repeatable process control with the reliability needed for modern 24/7 production. Process engineers and technologists can leverage new capabilities with unprecedented speed, measurement timing precision, and control accuracy.

Unique and customer-driven solutions can drastically increase performance. Inteleg®2B-PEM® solutions offer an ever-growing envelope of advantages, ranging from advances in thin-film materials to productivity increases and scrap prevention.


  • Process reproducibility and long-term stability
  • Automated calibrations and system health checks
  • Dramatic process improvements
  • Scrap and down-time prevention
  • Easy installation and OEM integration
  • Rugged design, single compact unit
  • Cost efficiency



Nova Fabrica focus on providing solutions that enable production yield optimisation, energy efficiency, enhanced QA and environmental friendliness through advanced processing, characterisation, monitoring, control and automation.



Nova Fabrica Ltd., Laisves g. 44, LT-30106 Ignalina

+370 37 999 994

+41 44 508 7477

+1 774 775 0025

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