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TECHNOLOGY
- Field-proven and precise plasma, ion and sputtering power supplies deliver reliable performance and enable multiple manufacturing markets:
- flat panel display,
- touch screen,
- glass,
- solar,
- semiconductor,
- precision optics,
- advanced packaging,
- decorative,
- etc.
HOW WE APPLY IT
- Sputtering: TCO, Metal, Reactive, Ceramic
- Plasma source: DC, MF AC, Inductive
- Ion beam: Anode-layer
- Bias and cleaning: DC, pulse-DC
CHALLENGE
Precise and reliable powering of plasma, ion or sputter sources is critical to any research and production system capacity to deliver higher product value, yield, and reduced ownership cost.
SOLUTION
Highly efficient DC and mid-frequency plasma generators drive advanced thin-film fabrication and surface treatment processes. Our power supplies were designed for 24/7 use and find many applications such as thin-film production, coating, cleaning, and activation, and are essential tools for R&D and pilots.
BENEFITS
- Higher film quality and higher throughput
- Reduced damage to film/substrate
- Reduced damage to hardware
- Stable operation during arcing
- Long-term stability
- OEM integration and cost efficiency
RELATED PRODUCTS
EN Technologies power supplies
